TY  - RPRT
TI  - Comparative study of the growth of sputtered aluminum oxide films on organic and inorganic substrates
AU  - Stefan Sellner
AU  - Alexander Gerlach
AU  - Stefan Kowarik
AU  - Frank Schreiber
AU  - Helmut Dosch
AU  - Stephan Meyer
AU  - Jens Pflaum
AU  - Gerhard Ulbricht
PY  - 2007
DO  - 10.1016/j.tsf.2007.12.151
UR  - https://arxiv.org/abs/0711.5019
ID  - 0711.5019
ER  -