@misc{indiciaec48d5368a091,
  title = {Micro-Hotplates for Thermal Characterisation of Structural Materials of Mems},
  author = {P. Furjes and P. Csikvari and I. Bársony and Cs. Ducso},
  year = {2008},
  url = {https://arxiv.org/abs/0801.0750},
  note = {Source identifier: 0801.0750}
}