@misc{indiciae7ee1acc0214c, title = {Vibration Combined High Temperature Cycle Tests for Capacitive MEMS Accelerometers}, author = {Z. Szucs and G. Nagy and S. Hodossy and M. Rencz and A. Poppe}, year = {2008}, url = {https://arxiv.org/abs/0801.1030}, note = {Source identifier: 0801.1030} }