@misc{indiciae9cd8fd073629, title = {Ion beam shaping and downsizing of nanostructures}, author = {M. Zgirski and K. P. Riikonen and V. Tuboltsev and P. Jalkanen and T. T. Hongisto and K. Yu Arutyunov}, year = {2008}, doi = {10.1088/0957-4484/19/05/055301}, url = {https://arxiv.org/abs/0801.2515}, note = {Source identifier: 0801.2515} }