@misc{indiciae2867ee69511a,
  title = {Strain selectivity of SiGe wet chemical etchants},
  author = {M. Stoffel and A. Malachias and T. Merdzhanova and F. Cavallo and G. Isella and D. Chrastina and H. von Kaenel and A. Rastelli and O. G. Schmidt},
  year = {2008},
  url = {https://arxiv.org/abs/0801.4211},
  note = {Source identifier: 0801.4211}
}