@misc{indiciae35b75a91a97a,
  title = {Fabrication of MEMS Resonators in Thin SOI},
  author = {D. Grogg and Nicoleta Diana Badila-Ciressan and Adrian Mihai Ionescu},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3040},
  note = {Source identifier: 0802.3040}
}