@misc{indiciae48b8cffb1eea, title = {Gas Damping Coefficient Research for MEMS Comb Linear Vibration Gyroscope}, author = {G. Qiufen and G. Yuansheng and S. Feng and L. Fuqiang}, year = {2008}, url = {https://arxiv.org/abs/0802.3048}, note = {Source identifier: 0802.3048} }