@misc{indiciaeb8ebe41e7c41,
  title = {Silicon on Nothing Mems Electromechanical Resonator},
  author = {C. Durand and F. Casset and P. Ancey and F. Judong and A. Talbot and R. Quenouillere and D. Renaud and S. Borel and B. Florin and L. Buchaillot},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3051},
  note = {Source identifier: 0802.3051}
}