@misc{indiciae0659e6a27809,
  title = {Set-up and characterization of a humidity sensor realized in LTCC-technology},
  author = {W. Smetana and M. Unger},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3066},
  note = {Source identifier: 0802.3066}
}