@misc{indiciae67a2ec9858e4, title = {Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device}, author = {H. K. Ma and B. R. Hou and H. Y. Wu and C. Y. Lin and J. J. Gao and M. C. Kou}, year = {2008}, url = {https://arxiv.org/abs/0802.3070}, note = {Source identifier: 0802.3070} }