@misc{indiciae7e67255fb656,
  title = {Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device},
  author = {L. Grasser and H. Mathias and F. Parrain and X. Le Roux and J. -P. Gilles},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3073},
  note = {Source identifier: 0802.3073}
}