TY  - RPRT
TI  - Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
AU  - L. Grasser
AU  - H. Mathias
AU  - F. Parrain
AU  - X. Le Roux
AU  - J. -P. Gilles
PY  - 2008
UR  - https://arxiv.org/abs/0802.3073
ID  - 0802.3073
ER  -