@misc{indiciae14869a251b47, title = {Solving functional reliability issue for an optical electrostatic switch}, author = {H. Camon and C. Ganibal and N. Rapahoz and M. Trzmiel and C. Pisella and C. Martinez and K. Gilbert and S. Valette}, year = {2008}, url = {https://arxiv.org/abs/0802.3075}, note = {Source identifier: 0802.3075} }