@misc{indiciae0de35d1fb4a1,
  title = {Tuneable Capacitor based on dual picks profile of the sacrificial layer},
  author = {S. Soulimane and F. Casset and F. Chapuis and P. -L. Charvet and M. aïd},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3078},
  note = {Source identifier: 0802.3078}
}