@misc{indiciae66c9ce0e6265,
  title = {A High-Q Microwave MEMS Resonator},
  author = {Z. Jian and Y. Yuanwei and Z. Yong and Chen Chen and J. Shixing},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3081},
  note = {Source identifier: 0802.3081}
}