@misc{indiciaeeb24280f8e6b,
  title = {Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching},
  author = {T. Akashi and Y. Yoshimura},
  year = {2008},
  doi = {10.1088/0960-1317/18/10/105004},
  url = {https://arxiv.org/abs/0802.3085},
  note = {Source identifier: 0802.3085}
}