TY  - RPRT
TI  - Profile Control of a Borosilicate-Glass Groove Formed by Deep Reactive Ion Etching
AU  - T. Akashi
AU  - Y. Yoshimura
PY  - 2008
DO  - 10.1088/0960-1317/18/10/105004
UR  - https://arxiv.org/abs/0802.3085
ID  - 0802.3085
ER  -