@misc{indiciaedd22d77e5a7e,
  title = {A Two-Step Etching Method to Fabricate Nanopores in Silicon},
  author = {G. -J. Wang and W. -Z. Chen and K. J. Chang},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3087},
  note = {Source identifier: 0802.3087}
}