TY  - RPRT
TI  - A Two-Step Etching Method to Fabricate Nanopores in Silicon
AU  - G. -J. Wang
AU  - W. -Z. Chen
AU  - K. J. Chang
PY  - 2008
UR  - https://arxiv.org/abs/0802.3087
ID  - 0802.3087
ER  -