@misc{indiciaed77a1fa8d98d,
  title = {Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems},
  author = {P. Schneider and S. Reitz and A. Wilde and G. Elst and P. Schwarz},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3089},
  note = {Source identifier: 0802.3089}
}