TY  - RPRT
TI  - Towards a Methodology for Analysis of Interconnect Structures for 3D-Integration of Micro Systems
AU  - P. Schneider
AU  - S. Reitz
AU  - A. Wilde
AU  - G. Elst
AU  - P. Schwarz
PY  - 2008
UR  - https://arxiv.org/abs/0802.3089
ID  - 0802.3089
ER  -