@misc{indiciae145d94043323,
  title = {Modeling of a piezoelectric micro-scanner},
  author = {A. Chaehoi and M. Begbie and D. Cornez and K. Kirk},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3090},
  note = {Source identifier: 0802.3090}
}