@misc{indiciae75e6da9cf0ad,
  title = {A novel method for fatigue testing of MEMS devices containing movable elements},
  author = {Z. Szucs and M. Rencz},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3091},
  note = {Source identifier: 0802.3091}
}