@misc{indiciaed05f1233f41c,
  title = {0-level Vacuum Packaging RT Process for MEMS Resonators},
  author = {N. Abelé and D. Grogg and C. Hibert and F. Casset and P. Ancey and A. Ionescu},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3093},
  note = {Source identifier: 0802.3093}
}