@misc{indiciaef0fc02e9204c,
  title = {Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems},
  author = {N. Marenco and S. Warnat and W. Reinert},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3095},
  note = {Source identifier: 0802.3095}
}