TY  - RPRT
TI  - Interconnect Challenges in Highly Integrated MEMS/ASIC Subsystems
AU  - N. Marenco
AU  - S. Warnat
AU  - W. Reinert
PY  - 2008
UR  - https://arxiv.org/abs/0802.3095
ID  - 0802.3095
ER  -