@misc{indiciae5c3aaf01f82e,
  title = {Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams},
  author = {M. C. Hsieh and D. K. Jair and Y. K. Fang and C. S. Lin},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3104},
  note = {Source identifier: 0802.3104}
}