TY - RPRT TI - Design and Fabrication of the Suspended High-Q Spiral Inductors with X-Beams AU - M. C. Hsieh AU - D. K. Jair AU - Y. K. Fang AU - C. S. Lin PY - 2008 UR - https://arxiv.org/abs/0802.3104 ID - 0802.3104 ER -