@misc{indiciae71c25ffa2775,
  title = {One MEMS Design Tool with Maximal Six Design Flows},
  author = {H. Chang and J. Xu and J. Xie and Ch. Zhang and Z. Yan and W. Yuan},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3105},
  note = {Source identifier: 0802.3105}
}