@misc{indiciae6538b03e2759,
  title = {Architecture for Integrated Mems Resonators Quality Factor Measurement},
  author = {H. Mathias and F. Parrain and J. -P. Gilles and S. Megherbi and M. Zhang and Ph. Coste and A. Dupret},
  year = {2008},
  url = {https://arxiv.org/abs/0802.3767},
  note = {Source identifier: 0802.3767}
}