@misc{indiciae8fbc3f2ad048,
  title = {Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns},
  author = {L. Zschiedrich and F. Schmidt},
  year = {2008},
  doi = {10.1117/12.793107},
  url = {https://arxiv.org/abs/0804.2587},
  note = {Source identifier: 0804.2587}
}