TY  - RPRT
TI  - Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns
AU  - L. Zschiedrich
AU  - F. Schmidt
PY  - 2008
DO  - 10.1117/12.793107
UR  - https://arxiv.org/abs/0804.2587
ID  - 0804.2587
ER  -