@misc{indiciae707e57319ac8, title = {Charge carrier induced lattice strain and stress effects on As activation in Si}, author = {C. Ahn and S. T. Dunham}, year = {2008}, doi = {10.1063/1.2956401}, url = {https://arxiv.org/abs/0804.3985}, note = {Source identifier: 0804.3985} }