@misc{indiciae484216912d72, title = {Study of improving nano-contouring performance by employing cross-coupling controller}, author = {Wen Yuh Jywe and Shih Shin Chen and Hung-Shu Wang and Chien Hung Liu and Hsin Hung Jwo and Yun Feng Teng and Tung Hsien Hsieh}, year = {2008}, url = {https://arxiv.org/abs/0804.4749}, note = {Source identifier: 0804.4749} }