@misc{indiciae9bf386ef15e7,
  title = {Study of low energy Si\$\_5\textasciicircum{}-\$ and Cs\$\textasciicircum{}-\$ implantation induced amorphization effects in Si(100)},
  author = {H. P. Lenka and B. Joseph and P. K. Kuiri and G. Sahu and P. Mishra and D. Ghose and D. P. Mahapatra},
  year = {2008},
  doi = {10.1088/0022-3727/41/21/215305},
  url = {https://arxiv.org/abs/0805.0066},
  note = {Source identifier: 0805.0066}
}