@misc{indiciaef6cae98d9988,
  title = {Consideration of arrayed \$e\$-beam microcolumn based systems potentialities for wafer defects inspection},
  author = {V. V. Kazmiruk and T. N. Savitskaja},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0248},
  note = {Source identifier: 0805.0248}
}