@misc{indiciae378a772f058e,
  title = {Electron Optic Design of Arrayed E-Beam Microcolumns Based Systems for Wafer Defects Inspection},
  author = {V. V. Kazmiruk and T. N. Savitskaja},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0495},
  note = {Source identifier: 0805.0495}
}