@misc{indiciaef304816d3d5d,
  title = {Porous Alumina Based Capacitive MEMS RH Sensor},
  author = {L. Juhasz and A. Vass-Varnai and Veronika Timar-Horvath and Marc Desmulliez and Resh Dhariwal},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0857},
  note = {Source identifier: 0805.0857}
}