@misc{indiciaec8e56d5ba7ac,
  title = {Integrated RF MEMS/CMOS Devices},
  author = {R. R. Mansour and S. Fouladi and M. Bakeri-Kassem},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0858},
  note = {Source identifier: 0805.0858}
}