@misc{indiciae4df08a592d18,
  title = {Micro Embossing of Ceramic Green Substrates for Micro Devices},
  author = {X. -C. Shan and S. H. Ling and H. P. Maw and C. W. Lu and Y. C. Lam},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0862},
  note = {Source identifier: 0805.0862}
}