@misc{indiciae7d6256f8d88b,
  title = {Characterization and Modeling of an Electro-thermal MEMS Structure},
  author = {P. G. Szabo and Vladimir Szekely},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0863},
  note = {Source identifier: 0805.0863}
}