@misc{indiciae323af1915c81,
  title = {Measurement of Large Forces and Deflections in Microstructures},
  author = {Kai Axel Hals and Einar Halvorsen and Xuyuan Chen},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0864},
  note = {Source identifier: 0805.0864}
}