TY  - RPRT
TI  - Measurement of Large Forces and Deflections in Microstructures
AU  - Kai Axel Hals
AU  - Einar Halvorsen
AU  - Xuyuan Chen
PY  - 2008
UR  - https://arxiv.org/abs/0805.0864
ID  - 0805.0864
ER  -