@misc{indiciae827a7198c456,
  title = {Manufacturing of A micro probe using supersonic aided electrolysis process},
  author = {R. F. Shyu and Litsai Weng and Chi-Ting Ho},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0868},
  note = {Source identifier: 0805.0868}
}