@misc{indiciae728aeb93ac93,
  title = {Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator},
  author = {M. Shamshirsaz and M. Maroufi and M. B. Asgari},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0888},
  note = {Source identifier: 0805.0888}
}