TY  - RPRT
TI  - Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator
AU  - M. Shamshirsaz
AU  - M. Maroufi
AU  - M. B. Asgari
PY  - 2008
UR  - https://arxiv.org/abs/0805.0888
ID  - 0805.0888
ER  -