@misc{indiciaeab644e522a7c,
  title = {Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models},
  author = {T. Veijola and Giorgio De Pasquale and Aurelio Somà},
  year = {2008},
  url = {https://arxiv.org/abs/0805.0893},
  note = {Source identifier: 0805.0893}
}