TY  - RPRT
TI  - Comparison Between Damping Coefficients of Measured Perforated Micromechanical Test Structures and Compact Models
AU  - T. Veijola
AU  - Giorgio De Pasquale
AU  - Aurelio Somà
PY  - 2008
UR  - https://arxiv.org/abs/0805.0893
ID  - 0805.0893
ER  -