@misc{indiciae4cd12eccbe43, title = {A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection}, author = {Y. -H. Wang and Tzu-Han Hsueh and Rong-Hua Ma and Chia-Yen Lee and Lung-Ming Fu and P. -Ch. Chou and Chien-Hsiung Tsai}, year = {2008}, url = {https://arxiv.org/abs/0805.0913}, note = {Source identifier: 0805.0913} }