TY  - RPRT
TI  - A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
AU  - Y. -H. Wang
AU  - Tzu-Han Hsueh
AU  - Rong-Hua Ma
AU  - Chia-Yen Lee
AU  - Lung-Ming Fu
AU  - P. -Ch. Chou
AU  - Chien-Hsiung Tsai
PY  - 2008
UR  - https://arxiv.org/abs/0805.0913
ID  - 0805.0913
ER  -